Automatic visual wafer inspection

11/01/1998

Automatic visual wafer inspection

The WAV-1000 system, for the automatic visual inspection of wafers, accommodates post-probe or pre-probe inspection. It is optimized to detect a full range of defects, such as contaminants, voids, scratches, and peels, and it improves yield by eliminating the tendency of operators to over-mark during the visual defect inspection that follows electrical probing of wafers. WAV-1000 requires <5 min for inspection of a 150-mm wafer at 5-?m resolution and accommodates wafer sizes of 5, 6, and 8 in. There is no restriction on die size. Semiconductor Technologies & Instruments Inc., Dallas, TX; ph 972/917-4030, fax 972/917-6405, e-mail [email protected].