Teflon wafewr carriers

11/01/1998

Teflon wafer carriers

EPI Teflon wafer carriers are molded and precision-machined from a single piece of PTFE or PTFM in sizes that handle wafers from 3 to 12 in. Free of microvoids and microporosity, the seamless carriers can incorporate slots, bars, and precise hole locations with tolerances to 0.003 in., depending on configuration; they have no pins, screws, or dovetails that can trap contaminants. The carriers operate from -450 to +500?F, have low extractables, and their low coefficient of friction almost eliminates particle shedding. Engineering Plastics Inc., Westboro, MA; ph 508/366-4425, fax 508/366-2575, e-mail [email protected], www.engineeringplastics.com.