Wafer-handling system

11/01/1998

Wafer-handling system

The WHU300 provides chipmakers with a complete wafer movement solution for their process tools. It is designed to receive a SEMI-standard FOUP, orient it, open it, and transfer wafers to the process station. Once the wafers are processed, the WHU300 returns them to the FOUP. Each WHU300 is customized for the specific tool and fully integrated into the process chamber technology. Automation Modules Inc., Fremont, CA; ph 510/661-2900, fax 510/252-1690, www.amirobotics.com.