Optical emission monitor

11/01/1998

Optical emission monitor

Designed for plasma diagnostics and endpoint detection, the INTELLUX 400 is a transducer-type, microprocessor-based, multichannel optical monitor with RS-485 and DeviceNet interfaces. It can accommodate up to four independent optical inputs processed through a common or individual band pass filter. The filters are available in the 200-1000 nm range . Using high-sensitivity UV-enhanced silicon detectors and offering a wide dynamic range of remotely adjustable gain settings, each channel accommodates a wide dynamic range of optical signals. The unit can be mounted directly to the process chamber using its KF40 or other standard vacuum flange. Custom fiber optic interfaces are also available, and a standard Windows application software package is provided with the unit. Custom embedded software is available for special and process control applications. Sycon Instruments Inc., East Syracuse, NY; ph 315/463-5297, fax 315/463-5298, www.sycon.com.