CMP robot

11/01/1998

CMP robot

The RR721 water-resistant robot series, for 300-mm CMP applications, features dual-arm architecture, a splash-proof upper body, and a 300-mm Z-axis stroke for 25-slot 300-mm FOUP access. The upper arm uses a rotating wrist joint for 180? wafer rotation, and "Vacuum-Grip" for quick transfer of wet wafers. Lip seals on all joints and a splashguard ring protect internal robot components. Rorze Automation Inc., Milpitas, CA; ph 408/935-9100, fax 408/935-9101, e-mail [email protected].