Hydrogen atom source

11/01/1998

Hydrogen atom source

Model HA10 Hydrogen Atom Source produces a high-purity, tunable flux of H atoms >1015 neutrals cm-2 s-1 with an average energy of 1 eV. The flux is produced by electron stimulated desorption of H atoms that diffuse through a metal alloy membrane. The source is designed to operate in UHV and does not produce UV radiation, ions, or fast neutrals. It can be added to existing UHV systems with 4.5-in. OD or larger flanges. Applications include: etching and cleaning of semiconductor surfaces where the substrate cannot tolerate the contamination, radiation, and ion and thermal damage associated with plasma sources; growth of diamond films; and in conjunction with surface analytical techniques and cross beam studies. Atom Sources Inc., Tallahassee, FL; ph 850/224-9696, fax 850/224-0803, e-mail [email protected], www.atomsources.com/atoms.