Subsurface defect detection system

11/01/1998

Subsurface defect detection system

The PBS-1000 Fast Mapper subsurface measurement system maps the level and distribution of subsurface defects in Si and GaAs materials. The defects of interest are typically introduced into the material during the surface finishing process. This includes sawing, grinding, lapping, polishing, and cleaning. Other defects, such as those introduced during the deposition of thin films or layers (epitaxy), and those introduced during such processes as ion implantation, are also easily detected. The system can map 8-in. wafers in 15 min with a 0.001 ppm/Sr scattered light detection level. Hologenix, Huntington Beach, CA; ph 714/903-5999, fax 714/903-5959, e-mail [email protected].