Europe
10/01/1998
Europe
RTP systems maker STEAG AST Elektronik, Kirchheim, Germany, has filed a suit in German courts alleging Applied Materials` Centura RTP system infringes its German RTP-related patents granted in 1993. Last year, Applied filed suit against STEAG in the US claiming the firm infringed three of its RTP-related patents; STEAG has filed a counterclaim.
Trikon Technologies, Newport, Wales, and LSI Logic Corp., will jointly develop low-k applications for Trikon`s Flowfill CVD system on sub-0.25-?m devices. The two firms have had a long-standing working relationship, and this deal will "enable us to refine our Flowfill equipment and processes so that we can better meet the industry`s critical demands," said Adrian Kiermasz, Trikon`s VP of technical marketing. Low-k development work is one of Trikon`s priorities as it regains strength in the wake of severe losses and a restructuring.
Busch GmbH`s semiconductor equipment group and Mitsubishi Heavy Industries have set a worldwide marketing, sales, and service joint agreement, under which Busch will add Mitsubishi`s turbo molecular vacuum pumps to its existing vacuum pump line. Production plants in the US, Germany, Switzerland, and Japan will also support the joint venture.
Leica Microsystems GmbH, Jena, Germany, has received an order from photomask supplier Photronics Inc. for a 250-nm high-end electron beam lithography system for use in its new facility in Manchester, England. The purchase agreement gives Photronics full access to Leica`s advanced lithography technology, which includes an option to purchase Leica`s first electron beam system designed for 130-nm technology.
Align-Rite International Inc., Cardiff, Wales, has placed an order with Etec Systems Inc. for two ALTA 3500 systems - photomask production laser pattern generation systems - and several MEBES electron beam system upgrades. The order was worth about $25 million. The ALTA system will be installed in Align-Rite`s manufacturing facility in Bridgend, Wales, the first to be installed by Etec in Europe. Installation of all equipment is scheduled to be completed by early 1999.