Furance cooling system

10/01/1998

Furnace cooling system

The FastCool Element System accelerates semiconductor furnace cooling while the product remains in the process chamber. During temperature ramp segments, it maintains a controlled atmosphere that prevents unwanted oxide growth and protects Qss. With the Aztec Black Max heating technology, the system provides cooling rates of about 15-20?C/minute for operating temperatures between 800-1200?C; 10-15?C/minute for temperatures between 500-800?C; and 2-10?C/minute for temperatures below 500?C. FastCool is suited for processes such as baking polyimide, spin-on glass, platinum silicide, gate oxides and other oxidation processes. MRL Industries, Sonora, CA; ph 209/533-1990, fax 209/533-4079, e-mail [email protected].