Exhaust abatement scrubbers

10/01/1998

Exhaust abatement scrubbers

The C-Series scrubbers are built of Flametec Corzan 4910 CPVC, conforming to the new Factory Mutual test protocol FMRC 4910. They are used to abate toxic and corrosive exhaust from such semiconductor processes as metal etch, poly etch, CVD, epitaxy, and wafer clean. The scrubbers are designed for sub-fab placement and are available with capacities from 80 LPM to 1500 CFM. Gradient Point Corp., Scottsdale, AZ; ph 602/998-1079, fax 602/998-0553, e-mail [email protected].