Photoresist detector

10/01/1998

Photoresist detector

The Preclude photoresist detector continuously polices degas chambers and detects wafers that are contaminated with resist in PVD cluster tools. It scans each wafer as it is degassed and sounds an alarm when even trace amounts of resist compounds remain on a wafer because of incomplete or missed strip. A signal from the high-sensitivity sensor can be used to shut down a cluster tool automatically to contain damage and avoid yield problems. Leybold Inficon Inc., E. Syracuse, NY; ph 315/434-1100, e-mail [email protected], www.leyboldinficon.com