Chemical blending in the fab

10/01/1998

Chemical blending in the fab

Smart Cart is a chemical transfer system for chemical blending that allows operators to collect a chemical from a bulk supply and transport, dispense, and blend that chemical safely and accurately with DI water at the desired concentration at numerous locations in the fab. Smart Cart is under PLC control and is powered by a rechargeable battery pack system. Chemical is stored in a 30-gallon tank in the cart, and a scale monitors the liquid level in the tank by weight. The tank is filled through a keyed Swage-Lock quick-connect fitting and shuts off automatically when full. Semco Corp., Livermore, CA; ph 925/371-4170, fax 925/371-4172, [email protected], www.semcocorp.com.