Vacuum robot

10/01/1998

Vacuum robot

Using the latest robot technologies and the MagnaTran 7 design, this series of robot options incorporates into new process tool designs or retrofits to existing in-fab tools. The MagnaTran 7 configurations have been enhanced to include a sensor bus interface, long Z-stroke, a cost-effective 2-axis configuration (radial and rotation without vertical Z motion), and enhanced safety features that include the Power Pak battery backup module and enhanced user-customizable interlocks. Brooks Automation Inc., Chelmsford, MA; ph 978/262-2607, e-mail [email protected], www.brooks.com.