Precision magnetic manipulators

10/01/1998

Precision magnetic manipulators

These precision magnetic manipulators, Compact PMMs, move samples in and out of both high- and ultrahigh-vacuum systems and control motion within these environments. They provide independent or simultaneous linear and rotary motions in a vacuum system and are used for actuating shutters or moving substrates, as well as for sample introduction. Compact PMMs are well suited to sample introduction via loadlock in SEM, surface analysis, semiconductor, and other thin film processes. Surface/Interface Inc., Sunnyvale, CA; ph 408/732-7111, fax 408/732-7191 e-mail [email protected].