In situ wafer temperature measurements

10/01/1998

In situ wafer temperature measurement

The field-proven wafer temperature data logging and monitoring technology of the Thermal TRACK handheld maintenance and troubleshooting product line is now available for use with ProcessProbe thermocouple-instrumented wafers. Designed for CVD and RTP process tools, the new, portable Thermal TRACK/TC logs thermocouple temperature data in real time from an array of up to 17 sensors embedded in wafers to provide direct in situ wafer temperature measurement. Key applications include checking and adjusting pyrometer calibrations, immediate troubleshooting for temperature-related process problems, and running predefined preventive maintenance checks tailored to customer equipment configurations. SensArray Corp., Santa Clara, CA; ph 408/727-4656, fax 408/496-6929, e-mail [email protected].