Wafer surface charging

10/01/1998

Wafer surface charging

CHARGER 200 is a tool for charging the surface of wafers by using corona discharge, allowing the measurement of the bulk lifetime on oxidized surfaces in connection with the ?-PCD method. The technique is reversible and nondestructive, permitting suppression of surface recombination at Si/SiO2 interfaces, suppression of inversion layers for high-frequency C-V measurements, reduction of the equilibrium time for quasi static C-V measurements, and breakthrough measurements at insulating layers. Amecon GmbH, 49/30-9869-4769, fax 49/30-9869-4759, e-mail [email protected].