Full-flow ozone sensor

10/01/1998

Full-flow ozone sensor

Model gFFOZ ozone sensor is designed for in situ, full-flow monitoring of process ozone. Installed directly in-line in a process stream at the gas delivery point, it provides continuous, in situ measurement of ozone at concentrations up to 400 grams/m3 or 26% w/w (at standard temperature and pressure). It can be installed in a process stream at flow rates from as low as 0.2 slpm up to 15 slpm or more. The sensor uses high-purity wetted materials and is "clean ready" for semiconductor processes. IN USA Inc., Needham, MA; ph 781/444-2929, fax 781/444-9229.