In situ process monitoring system

10/01/1998

In situ process monitoring system

Ultratrace-IQ is designed for gas monitoring of process chambers on PVD, CVD, and etch tools, and incorporates a quadrupole gas analyzer designed for process integration and control, with many features aimed toward the stringent requirements of 300-mm wafer processing. Features include: stored process recipes (methods) for easy recall; monitoring and alarming on any number of gases; a gas database for easy gas selection; derived values for endpoint calculation; autotuning circuitry to improve instrument performance and reliability; multianalyzer capability for cluster tools installation; DDE for direct reading of data into Windows application software; self-diagnostics and status display; and fail-safe operation with pressure and I/O interlocks. VG Gas Analysis Systems, Winsford, UK; ph 44/1606-548700, fax 44/1606-548711, e-mail [email protected], www.vggas.com.