Wafer transport vehicles

10/01/1998

Wafer transport vehicles

The Machine Loading Robot Vehicle is a track-guided vehicle that transports 300-mm wafers carriers between process tools and stockers in a process bay, loading and unloading individual wafer carriers. It is best suited to high-throughput bays with multi-lot batch tools. The Ergoloader Person Guided Vehicle (PGV) is a flexible, lightweight, manually operated cart for intrabay transport of 300-mm wafer carriers among bay stockers and process tools. It is available in both side-by-side and two-stack versions, and is suited for use in pilot lines, metrology bays, and low-throughput bays. The PGV can load any E47-compliant FOUP onto any E15.1-compliant loadport. PRI Automation Inc., Billerica, MA; ph 978/670-4270, www.pria.com.