Film thickness metrology tool

10/01/1998

SEM and TEM sample preparation

SELA STRATEM is an advanced sample preparation system for scanning (SEM) and transmission (TEM) electron microscopy. It combines automation with enhanced target accuracy, increasing process yield and effectiveness by reducing overall an-alysis cycle time. SEM cross-sections are processed in 15 min and preparatory samples for TEM require only 35 min. For extensively used SEM analysis, the system performs integral die and wafer cross-sectioning applying patented microcleaving technology. Using the natural crystal planes of the silicon structure, STRATEM can cleave samples with a minimum initial size of just 4.2 ? 2.1 mm. A built-in liquid nitrogen function enhances the quality of cross-sections for application-specific layer types. SELA USA Inc., Santa Clara, CA; ph 408/988-5151, fax 408/988-3322, e-mail [email protected].