Equipment automation software

10/01/1998

Equipment automation software

SMART-Station software fully automates the operation of fab processing and metrology equipment, providing the critical interface between shop-floor control systems and process and metrology tools on the factory floor. Combined with lot-tracking systems, SMART-Station reduces costly processing mistakes and material losses in both SMIF and non-SMIF fabs by ensuring that the correct lot is processed by the proper equipment with the right recipe. The system coordinates the manufacturing execution systems, fab equipment, SMIF interfaces, and AUTO-ID system interfaces, as well as automating the implementation of standard operating procedures at the tool. Asyst Technologies Inc., Fremont, CA; ph 510/661-5000, fax 510/661-5160, www.asyst.com.