Automated DUV inspection system

10/01/1998

Automated DUV inspection system

Axiospect 300 is a 300-mm automated DUV system for inspection and defect analysis of 0.13-?m geometries and beyond. It offers complete DUV inspection capabilities, such as visual defect review and classification, automatic defect classification (ADC), second optical inspection, and wafer sorting - in a fully SMIF platform. Software is based on Windows NT and includes digital image processing and management, with GEM/SECS-II compliance, defect review file support of KLA-Tencor, Inspex, and Orbot formats, data transfer to yield management systems, and offline recipe generation. The standard system is configured for SMIF operation, including front-loading FOUPs. The optical system is designed for the highest imaging performance with a variety of contrasting techniques, including brightfield DUV, real-time broadband confocal, laser scanning UV confocal, and 3-D spatial imaging. Imaging in UV can be done in standard brightfield at 365 and 248 nm, and in laser confocal scanning at 365 nm. Resolution down to 0.07 ?m has been achieved. System automation includes up to four FOUP loadports and integrated auto pod-ID. Carl Zeiss Inc., Thornwood, NY; ph 800/233-2343, fax 914/681-7446, e-mail [email protected], www.zeiss.com.