STEAG AST Electronik

10/01/1998

FIB/SEM stage automation software

Moves automation software, for the XL800 series of SEMs and DualBeam defect review and characterization tools, provides operators with fast, accurate, and automated access to the best available image of a specific submicron defect. The stage software increases the number of defects/hr that can be characterized by automatically compensating for sample rotation and tilt, controlling complex stage motions, and creating wafer height maps. Operators can bring a defect into focus quickly and concentrate on studying and analyzing the images instead of spending time re-adjusting the SEM imaging parameters every time the defect is moved for observation. Moves works with this company`s high-accuracy, five-axis 200-mm wafer stage to keep the defect in the field of view and automatically adjust parameters affecting image quality during the most complex motions. When similar samples are loaded repeatedly, the system can be pre-programmed to drive quickly to the desired points on the sample, such as alignment points or known areas of interest. FEI Co., Hillsboro, OR; ph 503/640-7500, e-mail [email protected].