Ultra shallow junction

10/01/1998

Ultra shallow junction

The Ultra-Shallow Junction (USJ) module is a combination of ion-implant and rapid thermal processing technologies that will enable chipmakers to form the transistor junctions required for faster device designs. By leveraging the synergy between the company`s xR LEAP (Low Energy Advanced Performance) ion implant system and XEplus Centura system, the USJ module offers a production-ready process for the development and manufacture of ultra-shallow junction transistors. Ultra-shallow transistor junctions are important roadmap requirements to achieve next-generation, gigahertz-speed devices using =0.18-?m design rules. Applied Materials, Santa Clara, CA; ph 408/727-5555, fax 408/986-8352, www.Applied Materials.com.