Mass spectrometry system

10/01/1998

Mass spectrometry system

The OmniStar mass spectrometry system is suited for exhaust monitoring of CVD processes, process control during production, and service/maintenance of CVD tools. It monitors all key functions including purge gas flow, and ensures that the scrubber is functioning properly and removing contaminants. The OmniStar features vacuum pumps, gauges, and a Prisma gas analyzer for fully interlocked start-up/shut-down and operation. OmniStar is equipped with the Windows-based Quadstar 422 software package, which facilitates data collection from a push-button interface. Pfeiffer Vacuum Inc., Nashua, NH; ph 603/578-6500, fax 603/578-6550, www.pfeiffer.vacuum.com.