RGA for HV/UHV applications

09/01/1998

RGA for HV/UHV applications

The QualiTorr Orion Compact (QOC) residual gas analysis (RGA) system is usedin single-chamber tools as well as on cluster tools, providing continuous monitoring in loadlock chambers and base pressure testing of process chambers. It can also be used for process monitoring in evaporation, molecular beam epitaxy, ion implant, and other high-vacuum processing applications. QOC has a complete electronic control unit on the sensor head with a direct connection to the host computer, and runs on field-proven Orion RGA and process monitoring software. QOC expands the QualiTorr Orion family of monitoring systems as a low-cost unit that operates from UHV up to 10-4 torr environments. The systems are all based on quadrupole mass spectrometry, and the family includes Orion monitors specific to such higher-pressure processes as PVD, CVD, and etch. The latest software package for QOC has features including data binning, multievent gas species-specific alarms, automatic recipe selection, and advanced SECS-II/GEM compatibility. MKS Instruments Inc., Andover, MA; ph 978/975-2350, fax 978/975-0093, e-mail [email protected].