Chemical dispensing

09/01/1998

Chemical dispensing

GenStream is a completely modular system for dispensing TEOS and other source chemicals. It saves fab space by offering top access to all major connections, and also provides easy access to 5-gallon Dynamax containers. Using a shuttle-shuttle operation, the system permits continuous chemical delivery and prevents impurity buildup. Its recipe screen allows for chemistry quantity, pressure, and refill time programming, so that the user can tailor operations to individual needs. Olin Microelectronic Materials, Norwalk, CT; ph 203/750-2687.