Thermal processing system

09/01/1998

Thermal processing system

The four-tube, horizontal Cyclone thermal processing system processes wafers up to 150 mm. Users can select from two "flat zones" for use with existing tubes (760/1010 mm): 30/40-in. flat zone for 6-8-in. wafers and 24/30-in. flat zone for 12-in. wafers. Both provide process capabilities in both high- and low-temperature applications. The Cyclone also features the proven Helix II heating elements and Argus gas delivery systems, a fully integrated PC-based DDCprocess controller designed to ensure precise temperatures from 200 to 1300?C, and a horizontal laminar flow inline load station with atmospheric cantilever assemblies for clean, automatic loading of all wafer sizes. MRL Industries, Sonora, CA; ph 209/533-1990, fax 209/533-4079, e-mail [email protected].