Loadlock wafer elevator

09/01/1998

Loadlock wafer elevator

Typical applications for this elevator include wafer processing and inspection, wafer furnaces, robotic wafer arms, transport, and FPD processing. It features the Super Smart Ball Bushing bearing guidance system and uses precision-ground, hardened-steel shafting that is available in stainless steel or plated for corrosion resistance. The precision preloaded ball screw assembly can also be plated for corrosion resistance. All of the aluminum parts are anodized for long life. Optional stainless steel hardware is available in addition to ball screw leads for a choice of speed ranges. Convenient T-slots on the carriage assembly allow for easy mounting of limit switches, shaft rotation devices, and other options. Thomson Industries Inc., Port Washington, NY; ph 800/554-8466, e-mail [email protected].