Fab management and tool integration

09/01/1998

Fab management and tool integration

Quality Management Component (QMC) and Tool Integration Component (TIC) are the first elements of a factory-wide control system called FAB300 (Factory Automation Blocks), which is designed to control fully automated 300-mm fabs. QMC allows for the collection of production and final test data to enable personnel to track quality throughout the facility, and permits automated responses and proactive control by providing closed-loop quality management. TIC provides for plug-and-play integration of the factory control system with all commonly used semiconductor equipment, making possible complete automation of manufacturing process steps, as well as integration with automated material movement. Consilium Inc., Mountain View, CA; ph 650/691-6100, fax 650/691-6130, www.consilium.com.