Second cassette for wafer prober

09/01/1998

Second cassette for wafer prober

The PS21 automatic prober now has a second cassette option that is available for both dc and RF wafer probing, allowing users to test 50 wafers continuously. The more automated process also lets users reject and sort wafers from one cassette to another. The standard PS21 accepts cassettes for wafer loading through a hinged front door. Cassettes are mounted on a slide-out tray for easy loading/unloading. The second cassette is located on the side of the prober and is accessed through a hinged lid. This is completely sealed to maintain a clean, dry environment within for protection of the probes and wafers. The precise material handler and pre-aligner ensure that all thinned wafers are loaded onto the chuck consistently. The PS21 accommodates standard-size wafers or can be modified for custom devices. Cross-slot detection is enhanced through a laser-based sensor that prevents damage to the device. The low-inertia design allows rapid motion with no sensitivity loss and has very few moving parts. The ejector pin on the chuck lifts the device or wafer for automatic handling. Cascade Microtech Inc., Beaverton, OR; ph 503/626-8245, fax 503/626-6023, e-mail [email protected], www.cascademicrotech.com.