Automated TEM sample preparation

09/01/1998

Automated TEM sample preparation

AutoFIB is a new control software for automated transmission electron microscope (TEM) sample preparation, using a focused ion beam (FIB), that makes sample preparation less labor-intensive. The simplest technique is unattended milling of the initial "rough" trenches on a number of samples. The next level is the use of multiple beam current steps, including image recognition routines within the automation software to allow high-accuracy registration of the milling to the final section location. The third level is to allow these final steps to be completed under automatic control, permitting highly precise and repeatable sample preparation -including the preparation of multiple samples. Samples can be prepared in less than an hour each. AutoFIB links together a series of system states or settings in editable, text-based scripts that allow control of ion beam current, stage movement, and gas injectors, as well as scan and milling parameters. The software has pattern recognition capability that can register the milling patterns to the required location within 15-30 nm without operator involvement. FEI Co., Hillsboro, OR; ph 503/640-7500, e-mail [email protected].