Thin film and surface analysis

09/01/1998

Thin film and surface analysis

The I-Elli2000 multiple wavelength imaging ellipsometer is designed for analysis of multiple layer systems. Its real-time imaging capability makes it possible not only to characterize the film in numbers but actually to see the structure and quality of the sample. By limiting the analysis to a user-defined region, valuable information is gained about refractive indexes and film thicknesses with a very high spatial resolution (repeatability for Psi and Delta is 0.02?, lateral imaging resolution is up to 0.5 ?m). Nanofilm Technologie GmbH, Goettingen, Germany; ph 49/551-62145, fax 49/551-62146, e-mail info@ nanofilm.de, www.nanofilm.de