Defect imaging and CD measurement

09/01/1998

Defect imaging and CD measurement

The HCS-UV optical system extends the range of fully automatic inspection and measuring systems with UV capabilities. A non-immersion, highly corrected UV objective, PL APO 150? with 0.90 NA, generates high-contrast images of features down to 130 nm. Defect detection will automatically extend to the 100-nm region. This imaging technique is fully automated and allows push-button comparison of UV images with white light confocal, ICR-contrast, darkfield, and brightfield. A real-time tracking laser autofocus is active for all imaging techniques. Leica Microsystems Inc., Deerfield IL; ph 847/405-0123, fax 847/405-0147, e-mail [email protected]