Resistance/resistivity measurement

09/01/1998

Resistance
esistivity measurement

The LEI 1510 contactless measurement system, for wafers up to 200-mm, is equipped with a three-range measurement head that measures high-range, low-range, and extra low-range samples. It can measure silicon wafers (bulk Si, metallizations, epi on high-resistivity substrates) and GaAs wafers (epi, metallizations, annealed ion implants on semi-insulating substrates) for sheet resistance, bulk resistivity, and thin film thickness. A 55-point mapping plan can be achieved in 150 sec for a 100-mm wafer. The 1510 is also available with a robotic unit. Lehighton Electronics Inc., Lehighton, PA; ph 610/377-5990, fax 610/377-6820, e-mail [email protected], ww.lehighton.com