Virtual ion implant service

09/01/1998

Virtual ion implant service

Remote Assist, a virtual service system offered by an ion implant supplier, uses video conferencing technology and a helmet equipped with a camera and microphone to link fabs with the supplier`s product experts for emergency or preventive maintenance of equipment. At the fab, an engineer wearing the helmet begins a Remote Assist session, sending real-time audio and video assessments of the problem area to the supplier. The supplier`s personnel see what the engineer sees and can then transmit current schematics, assembly drawings, photos, and other electronic documentation to the helmet, where the engineer will receive the images immediately. Remote Assist will hasten problem identification and resolution, minimize costly service calls or visits from factory personnel, and will provide a low-key tool for training customer engineers. Varian Semiconductor Equipment, Palo Alto, CA; ph 650/424-5997, e-mail lori.cox@sebcs varian.com.