SPIEs 1998-1999 continuing education catalog

09/01/1998

SPIE`s 1998-1999 continuing education catalog

This 88-page catalog offers a complete listing of SPIE`s regional short courses. Short courses in microelectronic manufacturing include the physics of metrology instruments; plasma processing; submicron device physics and technology; advanced silicon wafer cleaning; chip reliability; and advanced stepper modeling, characterization, control, and matching. Short courses in microlithography include resist thickness bake, exposure, and development control; lithography process control; advanced topics in optical lithography; microlithographic lens design; and resists for deep-UV lithography. In addition, such short courses as optoelectronic interconnects and packaging; multilevel interconnect technology; and micro-optics and MEMS are available on the topic of photochemical coatings, interconnects, and MEMS. Video and CD-ROM courses, as well as in-company customized programs are also available. SPIE, PO Box 10, Bellingham, WA 98227-0010; ph 360/676-3290, fax 360/647-1445, e-mail [email protected], www.spie.org.