Spectral data acquisition brochure

09/01/1998

Spectral data acquisition brochure

This six-page, color brochure highlights the SpectraSense/NCL spectral data acquisition system for spectroscopic applications, including fluorescence, laser, and LED characterization; optics testing; Raman; absorption; transmittance; and reflectance. For the researcher, the NCL system permits control of two scanning monochromators, data acquisition with up to three detectors, photon counting, and control of motorized accessories such as filter wheels; the industrial customer will gain a full-process-monitoring system with real-time predictive chemometric analysis. Total automation permits system operation by technicians and programmable GO/NO GO alarms help to optimize processes. The SpectraSense/NCL is designed to run under Windows 95 and Windows NT. Acton Research Corp., Acton, MA; ph 978/263-3584, fax 978/263-5086, e-mail [email protected], www.acton-research.com.

Air flotation separator brochure

This four-page, four-color brochure highlights the Folded Flow dissolved air flotation separator. The Folded Flow hydraulic design uses the density gradients and currents inherent in every flotation process, "folding" the flow by removing effluent from the same end of the tank where the influent is introduced. This results in a higher hydraulic loading rate. The instrument also works in a small footprint, while maintaining the float concentration and energy efficiency of the process. US Filter/Envirex, Waukesha, WI; ph 414/547-0141, fax 414/547-4120, www.usfilter.com.

Ion chromatography application note

This illustrated application note details an ion chromatography method used for determining trace anions in the water-miscible organic solvents that come into contact with microelectronic circuitry. A 4-mm IonPac AG9-HC column is used to concentrate and remove anions from the solvent matrix. These ions are then eluted to a 2-mm IonPac AS9-HC analytical column set for separation. Completed in less than 45 min, the process produces method detection limits for chloride, sulfate, phosphate, and nitrate between 0.0010 and 0.18 ?g/liter. Dionex Corp., Sunnyvale, CA; ph 408/737-0700, www.dionex.com.

Pressure transducer brochure

This brochure describes Micro-Baratron 870 and 872 pressure transducers designed specifically for use in process gas delivery systems. Focusing on the abilities of these instruments to ensure constant, accurate, and repeatable delivery of gases to a process tool, the brochure details the transducers` canister diameter of <1 in.; design for custom configuration; high-performance measuring techniques; and the chromium- and nickel-rich Inconel and Incoloy construction of their sensors, which minimizes the effects of corrosive gases on the semiconductor manufacturing process. MKS Instruments Inc., Andover, MA; ph 800/227-8766, fax 978/975-0267, www.mksinst.com.

Backside wafer inspection application note

The tenth in a series of application notes, "Backside Emission Microscopy at the Wafer Level" will be of use to engineers grappling with the need to perform wafer-level inspection for leakage and functional defects. Many advanced devices cannot be inspected for these defects from the front side because of numerous layers of metallization or other advanced design features. Light from defects escapes through the wafer backside after silicon has been thinned, sometimes to as little as 40 ?m. Key sections of the note discuss the thinning process and the transmission of light through silicon of various dopant levels. For backside emission inspection, the wafer is mounted face down. Ultra-low force probe needles probe the bond pads on the face, while the emission microscope makes emission and illuminated images from the backside. The wafer is thus supported only at the edges. Important sections of the note provide details of wafer bending and wafer reinforcement to ensure safe handling during emission inspection. Hypervision Inc., Fremont, CA; ph 510/651-7768, fax 510/651-1415, e-mail [email protected].

Assembly products chart

This notebook-size reference provides a "quick tour" of a line of 15 standard products for assembling and handling semiconductor and hybrid devices. The chart gives the model number and name, defines principal usage, and shows a photograph of each of the manual and semiautomatic production tools. A similar chart is available for downloading from the manufacturer`s web site. Semiconductor Equipment Corp., Moorpark, CA; ph 805/529-2293, fax 805/529-2193, www.semicorp.com.

Cooling catalog

The 1998 version of the FTS Direct catalog provides clean, controlled temperature solutions for replacing liquid nitrogen and dry ice with precision control to hold ?0.1?C stability. The catalog offers solutions for cooling semiconductor process equipment and ICs, as well as other cooling or heating applications from -90 to +130?C. FTS Systems Inc., Stone Ridge, NY; ph 800/824-0400 ext 0, fax 914/687-7481, e-mail [email protected].

Diamond and silicon coatings brochure

UltraC Diamond and Ultra High Pure Silicon (99.999%) coatings, used by semiconductor equipment manufacturers for particle and contamination reduction, are highlighted in this brochure. Shown to reduce levels of aluminum and iron contamination on silicon wafers when used in wafer-processing equipment, the coatings have been applied to various substrates, including ceramics, metals, and polymers, by a conformal plasma process at temperatures <100?C. They can be used on areas of several square feet. Surmet Corp., Burlington, MA; ph 800/262-8783 or 781/272-3250, fax 781/272-9185, e-mail [email protected], www.surmet.com.

Machine vision product guide

The Machine Vision Product Guide contains complete specs on a line of Invaritar and Macro Invaritar telecentric gauging lenses, as well as Invaribar machine vision modules and off-the-shelf components. It also includes extensive tutorials and application notes. Melles Griot, Optical Systems, Rochester, NY; ph 800/775-7558 or 716/244-7220, fax 716/244-6292, e-mail [email protected], www.mellesgriot.com.

Electronic chemicals group brochure

This brochure reviews the manufacturing, product, and distribution capabilities of a producer of ultra-high-purity semiconductor process chemicals. It presents the producer`s basic manufacturing concept, integration from raw materials to finished product, and its combined production, analytical, and packaging operations. The brochure then summarizes the more than 30 acids, etchants, and solvents offered and the purity grades in which they are available. The company`s ISO registration, chemical recycling program, and national and international sales and distribution presence are also discussed. General Chemical Corp., Electronic Chemicals Group, Pittsburg, CA; ph 800/247-4519.

Loadlock/sample transfer notes

These application notes describe a family of manual and motorized loadlocks for sample and substrate transfer in UHV, HV, ultraclean, and ultradry environments. The loadlocks feature precision magnetic manipulators that have independent dual motion and positive sealing to avoid introducing atmospheric gases into the analytical chamber. Requiring less maintenance than smooth rods that seal against teflon rings, the manipulators can also be baked, allowing a harder vacuum to be achieved. The loadlock/sample transfer systems can also handle multiple samples, transfer large samples over long travel distances, achieve 360? rotation, and perform complex motions. They are MASCOT- and MESC-compatible and can introduce up to 300-mm wafers into a module without tying up or requiring a central robot. Surface/Interface Inc., Sunnyvale, CA; ph 408/732-7111, fax 408/732-7191.

NSMP progress report

A progress report recently published by The National Institute of Standards and Technology (NIST) summarizes six projects undertaken by NIST`s National Semiconductor Metrology Program (NSMP). The program, managed by NIST`s Office of Microelectronics Programs, is designed to meet the most critical measurement needs identified by industry, including those listed in the National Technology Roadmap for Semiconductors. The following titles are included in the report: "Innovative Microscope Ready to Measure Industry Samples," "NIST Enters Negotiations to License Revolutionary Microcalorimeter," "New Reliability Testing Technique Saves Months of Time," "Standard Reference Materials Improve Silicon Wafer Resistivity Testing," "More Accurate Dopant Profiling Possible from Scope Images," and "Ultra-precise Tool for Calibrating Water-vapor Detectors Unveiled." NIST, Gaithersburg, MD; fax 301/926-1630, e-mail [email protected], www.nist.gov/public_affairs/factsheet/nsmp.htm.

Cleanroom products web site

Fourteen new pages featuring products related to static and contamination control in the semiconductor, flat panel display, disk drive manufacture, and electronics assembly industries have been added to a manufacturer`s web site. From a new home page, visitors can select any of the major industries served and access product information pages illustrated with color photos. Additional topics available include a description of the manufacturer; company news and happenings; ionization information; worldwide locations of the company; and a literature request response form. SIMCO Static Control and Cleanroom Products, Hatfield, PA; ph 800/ 538-0750 or 215/822-2171, fax 215/997-3450, www.simco-static.com.