cleaning and drying system

08/01/1998

Cleaning and drying system

This cleaning and drying system for 300-mm FOUPS, Capsil, and Crystalpak shipping containers uses DuPont`s Vertrel solvent azeotrope, a nonflammable, environmentally friendly solvent that meets or exceeds OSHA and EPA regulations. The system can be easily adapted for all molded, process, transport, and SMIF systems, regardless of product size -100-200-mm wafer cassettes, shippers, and SMIF pods, as well as disk media carriers and shippers. The system is bacteria-free, and there is no water contamination, no outgassing contamination, and no nonvolatile residue left on critical surfaces. S&K Products International Inc., Chestnut Ridge, NY; ph 914/425-6200, fax 914/425-6670, e-mail [email protected].