RF power delivery system

08/01/1998

RF power delivery system

The Apex 13.56 MHz RF power delivery system provides power repeatability, high reliability, and low cost through the integration of the 13.56 MHz power amplifier, impedance match, and VI probe. The single-package design reduces the number of parts compared with existing systems and incorporates SwitchMatch, a selectable fixed impedance match using pin diodes. The Apex platform is available in power ranges of 1-10 kW and frequencies of 13.56 and 27.12 MHz. MTBF is 200,000 hrs. Advanced Energy Industries Inc., Fort Collins, CO; ph 970/407-6206, fax 970/221-5583.