Particle size analyzer
08/01/1998
Particle size analyzer
The Ultrasizer uses acoustic attenuation spectroscopy rather than an optically based system for particle size measurement; it is effective in monitoring particle distributions in CMP slurries. Sound waves interact with particles in a similar manner to light, but they can also travel through concentrated suspensions and emulsions. The Ultrasizer works across a broad concentration range of 10 nm to 1000 ?m, covering the entire particle size range found in both fresh and spent CMP slurries. Malvern Instruments, Malvern, UK; ph 44/1684-892456, fax 44/1684-892789, e-mail [email protected], www.malvern.co.uk.