noncontact air-gap CV technology

08/01/1998

Noncontact air-gap CV technology

The SSM 3000 Nano GAP CV system measures CV and Ct characteristics using a noncontact, nondestructive air-gap CV sensor. Capable of monitoring 200- and 300-mm wafers, it includes a measurement chamber designed to exclude light and maintain thermal equilibrium conditions, and it easily measures the surface of processed wafers immediately following oxidation, or bare wafers immediately following epitaxial silicon growth. The system includes software that provides mapping, control of measurement conditions, and a variety of utility controls. Solid State Measurements Inc., Pittsburgh, PA; ph 412/787-0620, e-mail [email protected].