High-vacuum pendelum valve

08/01/1998

High-vacuum pendulum valve

Series 65 pendulum valves have virtually particle-free operation for pressure control throttling and isolation in etch and CVD processes, and feature a stepper motor-driven gate that pivots in-line with the port and a locking ring that compresses to make the seal with a low vibration level during control operation. Eliminating bearings or cams under vacuum, the valves are constructed from Al, hardanodized Al, or Ni-plated Al, with elastomer seals to match the application. Sizes range from DN 63-320. VAT Inc., Woburn, MA; ph 800/935-1446, fax 781/935-3940, e-mail [email protected], www.vatvalve.com.