CMP system

08/01/1998

CMP system

The PM300 APOLLO CMP system, dedicated to 300-mm wafer processing, features automatic process control, automatic wafer rework, stress-minimized dry-in/dry-out wafer processing, spinless drying, and remote system control/maintenance. Peter Wolters CMP Systems, Rendsburg, Germany; ph 49/4331-458305, fax 49/4331-458253, e-mail [email protected], www.peter-wolters.com.