Wafer-handling prealigner

08/01/1998

Wafer-handling prealigner

The Per4Mer 3000 prealigner provides accuracy in all wafer-handling applications and offers direct support for the Per4Mer series robots. It locates SEMI standard flat or notched wafers with an angular repatability of ?0.1? and a centering repeatability of ?0.001 in. The unit features a small footprint, a programmable digital vacuum sensor, a digital CCD-based micrometer, and an allowable in-coming offset of ?0.31 in. The 300 can accommodate wafers up to 300 mm and SEMI standard opaque square substrates up to 7.5 in. Cybeq Systems, Sunnyvale, CA; ph 408/328-3400, fax 408/328-3434.