Lithography process station

08/01/1998

Lithography process station

The Millennium 2000 photolithography process station is a track system that is available in configurations for apply, bake or develop. It processes wafers from 2 to 8 in.; footprint is 19 ? 66 in. Designed as an automated tool, the 2000 uses a single controller for a single track and its GUI employs icons and a touchscreen for programming. Control system architecture is Y2K-compliant and furnishes a seamless interface to pumps, temperature control units, and communication links to a host computer. The single load/unload station provides a cost-effective means for use with SMIF pods. Site Services Inc., Santa Clara, CA; ph 408/980-1155, fax 408/980-1267, www.site.com/mm.