PVD system

06/01/1998

PVD system

The Sigma fxP PVD system clusters mature Sigma process modules around an eight-sided, high-throughput platform. It achieves >300 hrs MTBF and >90% uptime thanks to a clampless processing philosophy and long-life shielding kits. Process solutions are available for manufacturing schemes down to sub-0.18-?m dual damascene. For sub-0.5-?m W-plug liner applications, the Hi-Fill Ti/TiN module uses clean, production-proven long throw technology. For Al plug-fill, the fxP offers Al reflow complemented by Forcefill high-pressure hole-fill, providing low-cost, high-productivity solutions for device generations from 1 to <0.18 ?m. Trikon Technologies, Newport, UK; ph 44/1633-414030, fax 44/1633-414005, www.trikon.com.