Atmospheric pressure cluster system

06/01/1998

Atmospheric pressure cluster system

Designed for photoresist stripping and simple etch processes, the Titan atmospheric pressure cluster system incorporates the field-proven Genmark 3-axis robot, two inductively coupled plasma process modules, and two optional wet cleaning stations, providing the user with reliable, high-throughput and cost-effective downstream plasma resist stripping. Trion Technology, Tempe, AZ; ph 602/968-8818, fax 602/968-8896.