ECR Plasma cleaner

06/01/1998

ECR plasma cleaner

The PlasmaQuest Series Ii high-density ECR microwave enhanced plasma source achieves low surface contact angles and high organic etch rates, uniformly processing a 4-sq-ft area in minutes. Applications are for semiconductor packaging and flat panel processing. Plasma-Quest, Dallas, TX; ph 408/531-1312, www.plasmaquest.com