Fiber optic infrared thermometer

06/01/1998

Fiber optic infrared thermometer

The M680 multichannel fiber optic infrared thermometer provides noncontact temperature sensing in such processes as RTP, CVD, PVD, plasma etching, epitaxial reactors, and crystal growing. Its high-speed multichannel processor, combined with a custom-designed sapphire probe, allows very precise silicon wafer temperature measurement; and its very short wavelength filter permits measurement of the wafer backside with no influence from halogen lamp radiation. Temperature span is from 150 to 4000?C. Other features of the M680 include: accuracy of 0.2% of reading; repeatability of ?0.1?C; local display of temperature and emissivity/channel; RS 232 bi-directional computer link; and compact 1/4 DIN sized electronics. Mikron Instrument Co. Inc., Oakland, NJ; ph 800/631-0176, fax 201/405-0090.